Global Research & Platforms and DPG Push MetExSPM Project

Since September 1, 2021, Global Research & Platforms and DPG have been involved in the development and industrialization of metrological high-speed scanning probe microscopes as part of the EU-funded project "MetExSPM - Traceability of localised functional properties of nanostructures with high speed scanning probe microscopy" (MetExSPM stands for 'Metrological Express Scanning Probe Microscope').

The goal of this project is to equip a new type of atomic force microscope, which will work with video frequencies above 1MHz, with a multidimensional positioning technology with the highest resolution for the sample and the probe – with atomic resolution. Furthermore, a scanning area of half an inch by half an inch should be covered, which is an extremely large area for this kind of technology. The following areas and groups are involved in the development of the systems, material procurement, and production:

Global Research & Platforms

Technology Center Magnetic Drives & Systems (TC MDS)
Technology Center Piezo Systems (TC PDS)
Corporate Advanced Research (CAR)
Electronics Platform Development (EPD)Global Research Prototyping

DPG

Value Stream Piezo Systems
Value Stream Electronic Devices

The TC PDS and the Value Stream Piezo Systems will provide a combined piezo system for positioning the measuring head consisting of a positioner that works in six degrees of freedom (6DoF) (polycrystalline) and a scanner that works in three degrees of freedom (monocrystalline). To fulfill the dynamic requirements, technologies for reaction force compensation shall be used. These are technologies that PI so far has only used in the piezo area for special dynamic tip/tilt mirrors. Supported by CAR (sensors) and EPD (power amplifier and sensor electronics), TC MDS develops a new electromechanically guided and driven planar magnetic levitation system (MagLev stage) for positioning the sample– a platform freely floating in space thanks to magnetic forces.

The high accuracy requirements are a major challenge and they lead to the use of ceramic materials with an extremely low expansion coefficient, which PI has not yet used in products. On a planar motion area of 12.7 mm x 12.7 mm and a simultaneous alignment in all six degrees of freedom in space, a repeatability better than below 300 pm (picometer) are envisaged.

As a central project partner, the German National Metrology Institute (Physikalisch-Technische Bundesanstalt, PTB) will integrate both motion systems into an atomic force microscope prototype. The delivery of the piezo and MagLev stages has been planned for Q2, 2023. During the second half of the three-year project, the focus will be on the metrological investigation and qualification of the new high-performance atomic force microscope with the best interferometers of the PTB.

With the PTB, the national metrology institutes of Finland (VTT), Poland (GUM), and of the Czech Republic (CMI) are also part of the project consortium. In addition to PI, Carl Zeiss SMT GmbH, Nanoanalytik GmbH, and the University of Wroclaw (Breslau, Poland) participate as external industry and tertiary education partners in the project.